- Contact Person : Mr. Peng Robert
- Company Name : Beijing Technol Science Co., Ltd.
- Tel : 86-10-62714351
- Fax : 86-10-62711482
- Address : Beijing,beijing,Room1108 jingyanlong mansion jingbangyuan district xisanqi bridge north haidian beijing china
- Country/Region : China
- Zip : 100096
Standard glove boxes
Detailed Product Description
Type | TZB450A | TZB450B | TZB450C |
Coating method | Resistance evaporation coating + Glove box | Magnetron sputtering coating + Glove box | Resistance evaporation + Magnetron sputtering + Glove box |
Film types | Simple substance, Oxides, Dielectrics, Semiconductor compound films, etc. | Metal / Nonmetal films, etc. | Simple substance films, Semiconductor films, Organic films, Oxide films, Reaction films, Dielectric films, Superconductor films, Metal ceramic films, Optical films, etc. |
Power supply | Evapourate power supply | DC/Bipolar pulse/RF power supply | evapourate / Bipolar pulse power supply |
Electrodes and targets | electrodes | Several magnetron sputtering targets | electrodes, magnetron sputtering target |
Dimension of the vacuum chamber | Φ450×H400 mm | ||
Structure of the vacuum chamber | Pre-open vertical structures, Postposition pumping systems, Manual push-and-pull manner | ||
Highest attained vacuum | 6. 6×10-5 Pa | ||
Vacuum pumps | Molecular pump + Mechanical pump | ||
Pumping speed | Pumping time≤20 min (Molecular pump) / 50 min (Diffusion pump), from atmospheric pressure to 10-3Pa | ||
Film uniformity | The fluctuations of the film thickness are less than 5% | ||
Structure of the electrodes | electrodes | ||
Magnetron sputtering | pulse power supply + permanent magnetic targets× 1-3 | ||
Baking temperature of the workpiece | Adjustable and controllable from room temperature to 300 °C (PID Temperature Control) | ||
Movement of the workpiece | 0-20 rpm adjustable and controllable stepless speed change revolution / rotation | ||
Vacuum control | Manual Control | ||
Vacuum measurement | Low-high digital composite vacuum gauge × 2 | ||
Vacuum control | Manual / PLC / PLC + HMI control | ||
Protection | Alarm and automatic protection function for water depletion, abnormal flow, over current flowing, over voltage, and electrical shutdown, etc. | ||
Basic parameters | Power≥12 KW; Served area: 9 m2; Weight: ~800 kg | ||
Optional devices | Quartz oscillator film thickness monitor, Hall ion source, Water cooling & recycling machine, Anti-sputtering cleaning, Air compressing machine | ||
