- Contact Person : Mr. Peng Robert
- Company Name : Beijing Technol Science Co., Ltd.
- Tel : 86-10-62714351
- Fax : 86-10-62711482
- Address : Beijing,beijing,Room1108 jingyanlong mansion jingbangyuan district xisanqi bridge north haidian beijing china
- Country/Region : China
- Zip : 100096
TSU600 Multi-functional Vacuum Coating Machine
Detailed Product Description
It is Multi-functional Vacuum Coating Machine, multi-arc ion plating and evaporationplating in one chamber. It is convenient to choose your favourites. They can be used separately or synchronously, then it is convenient to plate monolayer or multi-layer films, such as matel, alloy, dielectric and so on.
Dimension of the chamber | Φ600×H600 mm double-layer water cooling |
Power supply | bipolar pulse power supply, multi-arc target power supply, evaporation power supply, Electromagnetic power supply |
Vacuum chamber | Pre-open vertical structures, Postposition pumping systems |
Coating methods | Magnetron sputtering ( electromagnetic target,cylindrical plane target, rectangular target) + Multi-arc ion plating +Evaporation plating |
Minus bias | optional |
Workpiece support | Available water cooling, heating, 0-20 rpm adjustable stepless speed change revolution / rotation, Film thickness monitoring |
Vacuum pumps | Molecular pump + Mechanical pump / Diffusion pump + Mechanical pump |
Highest attained vacuum | Molecular pump (6.6×10-5 Pa); Diffusion pump (6.6×10-4 Pa) |
Pumping speed | Pumping time≤20 min, from atmospheric pressure to 10-3Pa |
Film uniformity | The fluctuations of the film thickness are less than 5% |
Baking temperature of the workpiece | Adjustable and controllable from room temperature to 300 °C (PID Temperature Control) |
Vacuum control | Available Manual / PLC / PLC + HMI / PC Control (optional) |
Gas flow control | 3-5 Road gas flow control |
Protection | Alarm and automatic protection function for waterdepletion, abnormal flow, over current flowing, over voltage, andelectrical shutdown, etc. |
Basic parameters | Power≥20 KW; Served area: 12 m2 |
Optional devices | Quartz oscillator film thickness monitor, Hall ionsource, Water cooling & recycling machine, Air pump,Anti-sputtering cleaning |
