- Contact Person : Mr. Peng Robert
- Company Name : Beijing Technol Science Co., Ltd.
- Tel : 86-10-62714351
- Fax : 86-10-62711482
- Address : Beijing,beijing,Room1108 jingyanlong mansion jingbangyuan district xisanqi bridge north haidian beijing china
- Country/Region : China
- Zip : 100096
Vacuum Machine-----Resistance Evaporation Coating Machines(ZHD230)
Detailed Product Description
Type | ZHD230 A | ZHD230 B | ZHD230 C |
Vacuum pumps | Diffusion pump + Mechanical pump | Molecular pump + Mechanical pump | Diffusion pump + Mechanical pump |
Highest attained vacuum | 6. 6 ×10-4Pa | 6. 6 ×10-5 Pa | 6. 6 ×10-4 Pa |
Power supply | 2 KW | ||
Structure of the electrodes | A pair of evaporation electrodes | A pair of evaporation electrodes | A pair of evaporation electrodes, A suit of carbon-spraying equipment |
Film types | Metal films, Oxide films, Dielectric films, Semiconductor films, organic films, etc. | ||
Evaporation electrodes | a pair of water-cooling electrodes | ||
Coating chamber | Dimension: 230×H300 mm; Material: glass cover; Top-down structure | ||
Pumping speed | Pumping time≤20 min (Molecular pump) / 30 min (Diffusion pump), from atmospheric pressure to 10-3Pa | ||
Film uniformity | The fluctuations of the film thickness are less than 5% | ||
Vacuum measurement | Low-high digital composite vacuum gauge × 1, from atmospheric pressure to 10-5 Pa | ||
Vacuum control | Manual Control | ||
Sample support | Φ80100 mm, Locates on the top of the chamber | ||
Protection | Alarm and automatic protection function for water depletion, abnormal flow, over current flowing, over voltage, and electrical shutdown, etc. | ||
Basic parameters | Power≥5 KW; Served area: 5 m2 | ||
Working environment and conditions | 1. Power supply: single-phase three-wire AC220 V, 50Hz, power ≥ 5KW 2. Independent ground wire < 3 Ω 3. Water supply: flowing rate≥10L/min, temperature: 1025 4. Room temperature: <30 5. Relative humidity: < 75% 6. No big dusts; No corrosive, flammable, explosible gases 7. No obvious vibrations in the room | ||
Optional devices | Water cooling & recycling machine | ||
