- Contact Person : Mr. Peng Robert
- Company Name : Beijing Technol Science Co., Ltd.
- Tel : 86-10-62714351
- Fax : 86-10-62711482
- Address : Beijing,beijing,Room1108 jingyanlong mansion jingbangyuan district xisanqi bridge north haidian beijing china
- Country/Region : China
- Zip : 100096
Vacuum Machine-----ZHD-450 Resistance Evaporation Coating Machines
Detailed Product Description
Vacuum Machine-----ZHD-450 Resistance Evaporation Coating Machines main vapor deposition function, single-preparation laboratory and industrial production quality oxide dielectric quality. semiconductor compounds, the most common method of high-temperature superconducting films.
Type | ZHD450 A | ZHD450 B | ZHD450 C |
Coating method | Resistance evaporation coating | Resistance / Electron beam evaporation coating | Resistance evaporation + Magnetron sputtering |
Film types | Organic films or Metal films etc. | Multi-layer films, various Filter films, Reflection films, Transmission films,? etc. | Single substance films, Semiconductor films, Organic films, Oxide films, Reaction films, Dielectric films, Semiconductor films, OLED devices, etc. |
Power supply | Evapourate power supply | Evapourate power supply, electron gun power supply | Evapourate power supply, pulse power supply |
Electrodes and targets | electrodes | electrodes, e-type electron gun | electrodes, circular plane magnetron sputtering target |
Vacuum control | Available Manual / PLC / PLC+HMI Control (optional) | ||
Dimension of the vacuum chamber | Φ450×H500 mm | ||
Vacuum chamber | Pre-open vertical structures, Postposition pumping systems, Manual push-and-pull manner | ||
Vacuum pumps | Molecular / Diffusion pump + Mechanical pump | ||
Pumping speed | Pumping time≤20 min (Molecular pump) / 50 min (Diffusion pump), from atmospheric pressure to 10-3Pa | ||
Film uniformity | The fluctuations of the film thickness are less than 5% | ||
Structure of the electrodes | Water-cooling electrodes | ||
Baking temperature of the workpiece | Adjustable and controllable from room temperature to 300 °C (PID Temperature Control) | ||
Movement of the workpiece | 0-20 rpm adjustable and controllable stepless speed change revolution / rotation | ||
Vacuum measurement | Two digital composite vacuum gauges | ||
Protection | Alarm and automatic protection function for water depletion, abnormal flow, over current flowing, over voltage, and electrical shutdown, etc. | ||
Basic parameters | Power≥12 KW; Served area: 12 m2; Weight: ~1200 kg | ||
Optional devices | Quartz oscillator film thickness monitor, Water cooling & recycling machine | ||
