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- Company Name : Beijing Technol Science Co., Ltd.
- Tel : 86-10-62714351
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Plasma Enhanced Chemical Vapor Deposition
Product Detailed
Related Categories:Metal Coating Machinery
Detailed Product Description
PECVD Series can be used for matel, dielectric and semiconductor coatings, such as SiO2, Si3N4, amorphous Si, polyeristalline Si, SiC, W, Ti-Si, GaAs, GaSb and so on. PECVD technology can greatly reduce the reaction temperature which is critical for some substrates. Especially it is beneficial for the semiconductor.
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