Resistance Evaporation Coating Machines

Detailed Product Description

These seris include ZHD-230A, ZHD-230B and ZHD-230C. Main technical specifications are as follows:

Vacuum pumps: Diffusion+Vane pump  or  Molecular pum+Vane pump

Ultimate vacuum: 6.6 ×10^-4 Pa(with Diffusion pump) or 6.6 ×10^-5 Pa(with Molecular pump)

Evaporation electodes: a pair of water-cooling electrodes

Coating chamber: Dimension:Φ230×H300mm;Material: glass cover; Top-down structure

Pump speed: Pump time20min(Molecular pump)/30min(Diffusion pump), from atmospheric pressure to 10^-3 Pa

Film uniformity: The fluctuations of the film thickness are less than 5%

Vacuum measurement: Low-hige digital composite vacuum gauge, from atmospheric pressure to 10^-5 Pa

Vacuum control: Manual Control

Sample support: Φ80-100mm, Locates on the top of the chamber

Protection: Alam and automatic protection funtion for water depletion, abnormal flow, over current flowing, over voltage, and electrical shutdown, etc

Basic parameters: Power≥5KW, Served area: 5m²

Working environment and conditions:

1. Power supply: single-phase three-wire AC220V,50Hz,Power≥5KW

2. Independent ground wire: <3Ω

3. Water supply: flowing rate≥10L/min, temperature:283-298K

4. Room temperatureL: ≤303K

5. Relative humidity:<75%

6. No big dust, No corrosive, flammable, explosible gases

7. No obvious vibrations in the room

Optional devices: Water cooling & recycling machine